Distributed electrode Mach-Zehnder modulator with double-pass phase shifters and integrated inductors

D. M. Gill, W. M.J. Green, C. Xiong, J. Proesel, A. Rylyakov, C. Schow, J. C. Rosenberg, T. Barwicz, M. Khater, S. Assefa, S. M. Shank, C. Reinholm, E. Kiewra, S. Kamlapurkar, Y. A. Vlasov

Research output: Contribution to conferencePaperpeer-review

Abstract

A novel high-speed Mach-Zehnder modulator (MZM) fully integrated into a 90 nm CMOS process is presented. The MZM features 'double-pass' optical phase shifter segments, and the first use of integrated inductors in a 'velocity-matched' distributed-electrode configuration.

Original languageEnglish (US)
StatePublished - Jan 1 2014
Externally publishedYes
Event2014 Conference on Lasers and Electro-Optics, CLEO 2014 - San Jose, United States
Duration: Jun 8 2014Jun 13 2014

Other

Other2014 Conference on Lasers and Electro-Optics, CLEO 2014
CountryUnited States
CitySan Jose
Period6/8/146/13/14

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Atomic and Molecular Physics, and Optics
  • Electronic, Optical and Magnetic Materials

Fingerprint Dive into the research topics of 'Distributed electrode Mach-Zehnder modulator with double-pass phase shifters and integrated inductors'. Together they form a unique fingerprint.

Cite this