Distributed electrode Mach-Zehnder modulator with double-pass phase shifters and integrated inductors

D. M. Gill, W. M.J. Green, C. Xiong, A. Rylyakov, C. Schow, J. Proesel, J. C. Rosenberg, T. Barwicz, M. Khater, S. Assefa, S. M. Shank, C. Reinholm, E. Kiewra, S. Kamlapurkar, Y. A. Vlasov

Research output: Contribution to journalArticlepeer-review

Abstract

A novel high-speed Mach-Zehnder modulator (MZM) fully integrated into a 90 nm CMOS process is presented. The MZM features 'double-pass' optical phase shifter segments, and the first use of integrated inductors in a 'velocity-matched' distributed-electrode configuration.

Original languageEnglish (US)
Pages (from-to)16857-16865
Number of pages9
JournalOptics Express
Volume23
Issue number13
DOIs
StatePublished - 2015
Externally publishedYes

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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