Distributed electrode Mach-Zehnder modulator with double-pass phase shifters and integrated inductors

D. M. Gill; W. M.J. Green; C. Xiong; A. Rylyakov; C. Schow; J. Proesel; J. C. Rosenberg; T. Barwicz; M. Khater; S. Assefa; S. M. Shank; C. Reinholm; E. Kiewra; S. Kamlapurkar; Y. A. Vlasov

doi:10.1364/OE.23.016857

Distributed electrode Mach-Zehnder modulator with double-pass phase shifters and integrated inductors

D. M. Gill, W. M.J. Green, C. Xiong, A. Rylyakov, C. Schow, J. Proesel, J. C. Rosenberg, T. Barwicz, M. Khater, S. Assefa, S. M. Shank, C. Reinholm, E. Kiewra, S. Kamlapurkar, Y. A. Vlasov

Research output: Contribution to journal › Article › peer-review

Abstract

A novel high-speed Mach-Zehnder modulator (MZM) fully integrated into a 90 nm CMOS process is presented. The MZM features 'double-pass' optical phase shifter segments, and the first use of integrated inductors in a 'velocity-matched' distributed-electrode configuration.

Original language	English (US)
Pages (from-to)	16857-16865
Number of pages	9
Journal	Optics Express
Volume	23
Issue number	13
DOIs	https://doi.org/10.1364/OE.23.016857
State	Published - 2015
Externally published	Yes

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

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10.1364/OE.23.016857

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Gill, D. M., Green, W. M. J., Xiong, C., Rylyakov, A., Schow, C., Proesel, J., Rosenberg, J. C., Barwicz, T., Khater, M., Assefa, S., Shank, S. M., Reinholm, C., Kiewra, E., Kamlapurkar, S., & Vlasov, Y. A. (2015). Distributed electrode Mach-Zehnder modulator with double-pass phase shifters and integrated inductors. Optics Express, 23(13), 16857-16865. https://doi.org/10.1364/OE.23.016857

Gill, DM, Green, WMJ, Xiong, C, Rylyakov, A, Schow, C, Proesel, J, Rosenberg, JC, Barwicz, T, Khater, M, Assefa, S, Shank, SM, Reinholm, C, Kiewra, E, Kamlapurkar, S & Vlasov, YA 2015, 'Distributed electrode Mach-Zehnder modulator with double-pass phase shifters and integrated inductors', Optics Express, vol. 23, no. 13, pp. 16857-16865. https://doi.org/10.1364/OE.23.016857

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abstract = "A novel high-speed Mach-Zehnder modulator (MZM) fully integrated into a 90 nm CMOS process is presented. The MZM features 'double-pass' optical phase shifter segments, and the first use of integrated inductors in a 'velocity-matched' distributed-electrode configuration.",

author = "Gill, {D. M.} and Green, {W. M.J.} and C. Xiong and A. Rylyakov and C. Schow and J. Proesel and Rosenberg, {J. C.} and T. Barwicz and M. Khater and S. Assefa and Shank, {S. M.} and C. Reinholm and E. Kiewra and S. Kamlapurkar and Vlasov, {Y. A.}",

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year = "2015",

doi = "10.1364/OE.23.016857",

language = "English (US)",

volume = "23",

pages = "16857--16865",

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AU - Gill, D. M.

AU - Green, W. M.J.

AU - Xiong, C.

AU - Rylyakov, A.

AU - Schow, C.

AU - Proesel, J.

AU - Rosenberg, J. C.

AU - Barwicz, T.

AU - Khater, M.

AU - Assefa, S.

AU - Shank, S. M.

AU - Reinholm, C.

AU - Kiewra, E.

AU - Kamlapurkar, S.

AU - Vlasov, Y. A.

PY - 2015

Y1 - 2015

N2 - A novel high-speed Mach-Zehnder modulator (MZM) fully integrated into a 90 nm CMOS process is presented. The MZM features 'double-pass' optical phase shifter segments, and the first use of integrated inductors in a 'velocity-matched' distributed-electrode configuration.

AB - A novel high-speed Mach-Zehnder modulator (MZM) fully integrated into a 90 nm CMOS process is presented. The MZM features 'double-pass' optical phase shifter segments, and the first use of integrated inductors in a 'velocity-matched' distributed-electrode configuration.

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Distributed electrode Mach-Zehnder modulator with double-pass phase shifters and integrated inductors

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