A novel high-speed Mach-Zehnder modulator (MZM) fully integrated into a 90 nm CMOS process is presented. The MZM features 'double-pass' optical phase shifter segments, and the first use of integrated inductors in a 'velocity-matched' distributed-electrode configuration.
|Original language||English (US)|
|Number of pages||9|
|State||Published - 2015|
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics