Distributed and thermo-acoustically coupled modeling for accurate prediction of thermal nonlinearity in piezoelectric MEMS resonators

Rahul Jhaveri, Ruochen Lu, Songbin Gong, Mattan Kamon

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, we employ for the first time a distributed and thermo-acoustically coupled modeling technique for thermal nonlinearity. The technique captures the true distribution of temperature throughout the resonator and its surrounding support structure. The resultant non-uniform temperature distribution modifies the stiffness coefficients in an acoustic simulation to directly compute the sensitivity of the frequency to power input. The technique results in new insights with respect to geometry, and enables geometric design tradeoffs to mitigate the effects of thermal nonlinearity. Our technique is compared to the lumped method in prior work and verified by measurements on two aluminum nitride resonators.

Original languageEnglish (US)
Title of host publication2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016
EditorsMark G. Allen, Tina Lamers
PublisherTransducer Research Foundation
Pages210-213
Number of pages4
ISBN (Electronic)9781940470023
DOIs
StatePublished - Jan 1 2016
Event2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016 - Hilton Head, United States
Duration: Jun 5 2016Jun 9 2016

Publication series

Name2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016

Conference

Conference2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016
CountryUnited States
CityHilton Head
Period6/5/166/9/16

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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