@inproceedings{8316f55bb1b646cea921885aaad8680f,
title = "Distributed and thermo-acoustically coupled modeling for accurate prediction of thermal nonlinearity in piezoelectric MEMS resonators",
abstract = "In this paper, we employ for the first time a distributed and thermo-acoustically coupled modeling technique for thermal nonlinearity. The technique captures the true distribution of temperature throughout the resonator and its surrounding support structure. The resultant non-uniform temperature distribution modifies the stiffness coefficients in an acoustic simulation to directly compute the sensitivity of the frequency to power input. The technique results in new insights with respect to geometry, and enables geometric design tradeoffs to mitigate the effects of thermal nonlinearity. Our technique is compared to the lumped method in prior work and verified by measurements on two aluminum nitride resonators.",
author = "Rahul Jhaveri and Ruochen Lu and Songbin Gong and Mattan Kamon",
note = "Publisher Copyright: {\textcopyright} 2016 TRF; 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016 ; Conference date: 05-06-2016 Through 09-06-2016",
year = "2016",
doi = "10.31438/trf.hh2016.57",
language = "English (US)",
series = "2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016",
publisher = "Transducer Research Foundation",
pages = "210--213",
editor = "Allen, {Mark G.} and Tina Lamers",
booktitle = "2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016",
}