@article{bc019a03b3504a90b4c90438cc5d0af0,
title = "Dissolvable Template Nanoimprint Lithography: A Facile and Versatile Nanoscale Replication Technique",
abstract = "Nanoimprinting lithography (NIL) is a next-generation nanofabrication method, capable of replicating nanostructures from original master surfaces. Here, we develop highly scalable, simple, and nondestructive NIL using a dissolvable template. Termed dissolvable template nanoimprinting lithography (DT-NIL), our method utilizes an economic thermoplastic resin to fabricate nanoimprinting templates, which can be easily dissolved in simple organic solvents. We used the DT-NIL method to replicate cicada wings which have surface nanofeatures of ∼100 nm in height. The master, template, and replica surfaces showed a >∼94% similarity based on the measured diameter and height of the nanofeatures. The versatility of DT-NIL was also demonstrated with the replication of re-entrant, multiscale, and hierarchical features on fly wings, as well as hard silicon wafer-based artificial nanostructures. The DT-NIL method can be performed under ambient conditions with inexpensive materials and equipment. Our work opens the door to opportunities for economical and high-throughput nanofabrication processes.",
keywords = "Nanoimprinting, nanomanufacturing, nanostructures, insect wing, template",
author = "Junho Oh and Hoffman, {Jacob B.} and Sungmin Hong and Jo, {Kyoo D.} and Jessica Rom{\'a}n-Kustas and Reed, {Julian H.} and Dana, {Catherine E.} and Cropek, {Donald M.} and Marianne Alleyne and Nenad Miljkovic",
note = "Funding Information: This work was supported by the Army Basic Research Program through collaboration with the U.S. Army Engineer Research and Development Center, Construction Engineering Research Laboratory under Grant ARMY CESU W9132T-16-2-0011. J.O. and N.M. gratefully acknowledge funding support from the National Science Foundation under Award 1554249 and the International Institute for Carbon Neutral Energy Research (WPI-I2CNER), sponsored by the Japanese Ministry of Education, Culture, Sports, Science, and Technology. Field-emission scanning electron microscopy and supercritical CO drying was carried out at the Beckman Institute, University of Illinois at Urbana–Champaign (UIUC). Atomic force microscopy was carried out at the Materials Research Laboratory Central Facilities, UIUC. J.O. and N.M. also acknowledge Prof. Sheng Shen at Carnegie Mellon University for providing the nanopyramid surfaces for replica fabrication. The authors thank Todd Fulton (Dept. of Entomology, UIUC) for his fly rearing efforts. Sandia National Laboratories is a multimission laboratory managed and operated by National Technology & Engineering Solutions of Sandia, LLC, a wholly owned subsidiary of Honeywell International Inc., for the U.S. Department of Energy{\textquoteright}s National Nuclear Security Administration under contract DE-NA0003525. This paper describes objective technical results and analysis. Any subject views or opinions that might be expressed in the paper do not necessarily represent the views of the U.S. Department of Energy or the United States Government. 2",
year = "2020",
month = oct,
day = "14",
doi = "10.1021/acs.nanolett.0c01547",
language = "English (US)",
volume = "20",
pages = "6989--6997",
journal = "Nano Letters",
issn = "1530-6984",
publisher = "American Chemical Society",
number = "10",
}