Displacement actuation and sensing for an electrostatic drive

Placid M Ferreira (Inventor), Jingyan Dong (Inventor)

Research output: Patent


An electrostatic drive includes a first electrode and a second electrode responsive to a drive signal. The drive signal includes an actuation signal constituent and a sensing signal constituent. The sensing signal constituent is at a frequency higher than a natural mechanical resonant frequency of the electrostatic drive. In response to the actuation signal constituent, displacement between the first electrode and the second electrode changes, which is evaluated by detecting a change in an electrical characteristic of the drive as a function of the sensing signal constituent.
Original languageEnglish (US)
U.S. patent number8076893
Filing date9/4/08
StatePublished - Dec 13 2011


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