Direction writing of graphene-based nanoribbons via thermochemical nanolithography

M. Haydell, E. Cimpoiasu, R. R. Stine, W. K. Lee, P. E. Sheehan, W. P. King

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This project employs direct writing with an atomic force microscope (AFM) to fabricate simple graphene-based electronic components like resistors and transistors at nanometer-length scales. The goal is to explore their electronic properties for graphene-based electronics. Conducting nanoribbons of graphene were fabricated using thermochemical nanolithography (TCNL). TCNL uses a heated AFM cantilever to provide precise local heating to an insulating fluorographene (FG) substrate. The heat reduces the substrate into a material known as reduced fluorographene (rFG) which exhibits electric properties close to those of pristine graphene. Compared to other attempts to produce graphene-based devices, this technique is simple, does not involve solvents or other complicated fabrication steps, and allows for the exact placement of the devices on the wafer.

Original languageEnglish (US)
Title of host publicationMAMNA 2012 Spring Symposium - Microsystems for Measurement and Instrumentation
DOIs
StatePublished - 2012
Event2012 Spring Symposium on Microsystems for Measurement and Instrumentation, MAMNA 2012 - Annapolis, MD, United States
Duration: Mar 27 2012Mar 27 2012

Publication series

NameMAMNA 2012 Spring Symposium - Microsystems for Measurement and Instrumentation

Other

Other2012 Spring Symposium on Microsystems for Measurement and Instrumentation, MAMNA 2012
Country/TerritoryUnited States
CityAnnapolis, MD
Period3/27/123/27/12

Keywords

  • Graphene
  • MOSFET circuits
  • Nanoelectronics
  • Thermochemical Nanolithography
  • Transistors

ASJC Scopus subject areas

  • Control and Systems Engineering

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