@inproceedings{18273889c95746c7b470966749a23d69,
title = "Direction writing of graphene-based nanoribbons via thermochemical nanolithography",
abstract = "This project employs direct writing with an atomic force microscope (AFM) to fabricate simple graphene-based electronic components like resistors and transistors at nanometer-length scales. The goal is to explore their electronic properties for graphene-based electronics. Conducting nanoribbons of graphene were fabricated using thermochemical nanolithography (TCNL). TCNL uses a heated AFM cantilever to provide precise local heating to an insulating fluorographene (FG) substrate. The heat reduces the substrate into a material known as reduced fluorographene (rFG) which exhibits electric properties close to those of pristine graphene. Compared to other attempts to produce graphene-based devices, this technique is simple, does not involve solvents or other complicated fabrication steps, and allows for the exact placement of the devices on the wafer.",
keywords = "Graphene, MOSFET circuits, Nanoelectronics, Thermochemical Nanolithography, Transistors",
author = "M. Haydell and E. Cimpoiasu and Stine, {R. R.} and Lee, {W. K.} and Sheehan, {P. E.} and King, {W. P.}",
year = "2012",
doi = "10.1109/MAMNA.2012.6195093",
language = "English (US)",
isbn = "9781467317818",
series = "MAMNA 2012 Spring Symposium - Microsystems for Measurement and Instrumentation",
booktitle = "MAMNA 2012 Spring Symposium - Microsystems for Measurement and Instrumentation",
note = "2012 Spring Symposium on Microsystems for Measurement and Instrumentation, MAMNA 2012 ; Conference date: 27-03-2012 Through 27-03-2012",
}