Directed self-assembly (DSA) template pattern verification

Zigang Xiao, Yuelin Du, Haitong Tian, Martin D.F. Wong, He Yi, H. S.Philip Wong, Hongbo Zhang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Directed Self-Assembly (DSA) is a promising technique for contacts/vias patterning, where groups of contacts/vias are patterned by guiding templates. As the templates are pat- terned by traditional lithography, their shapes may vary due to the process variations, which will ultimately affect the con- tacts/vias even for the same type of template. Due to the complexity of the DSA process, rigorous process simulation is unacceptably slow for full chip verication. This paper formulate several critical problems in DSA verication, and proposes a design automation methodology that consists of a data preparation and a model learning stage. We present a novel DSA model with Point Correspondence and Segment Distance features for robust learning. Following the method- ology, we propose an effective machine learning (ML) based method for DSA hotspot detection. The results of our initial experiments have already demonstrated the high-efficiency of our ML-based approach with over 85% detection accuracy. Compared to the minutes or even hours of simulation time in rigorous method, the methodology in this paper validates the research potential along this direction.

Original languageEnglish (US)
Title of host publicationDAC 2014 - 51st Design Automation Conference, Conference Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Print)9781479930173
DOIs
StatePublished - Jan 1 2014
Event51st Annual Design Automation Conference, DAC 2014 - San Francisco, CA, United States
Duration: Jun 2 2014Jun 5 2014

Publication series

NameProceedings - Design Automation Conference
ISSN (Print)0738-100X

Other

Other51st Annual Design Automation Conference, DAC 2014
CountryUnited States
CitySan Francisco, CA
Period6/2/146/5/14

Keywords

  • Directed Self-Assembly
  • Hotspot
  • Machine Learning
  • Verication

ASJC Scopus subject areas

  • Computer Science Applications
  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Modeling and Simulation

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  • Cite this

    Xiao, Z., Du, Y., Tian, H., Wong, M. D. F., Yi, H., Wong, H. S. P., & Zhang, H. (2014). Directed self-assembly (DSA) template pattern verification. In DAC 2014 - 51st Design Automation Conference, Conference Proceedings [2593125] (Proceedings - Design Automation Conference). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1145/2593069.2593125