Direct writing of sub-5 nm hafnium diboride metallic nanostructures

Wei Ye; Pamela A. Peña Martin; Navneet Kumar; Scott R. Daly; Angus Rockett; John R. Abelson; Gregory S. Girolami; Joseph W. Lyding

doi:10.1021/nn1018522

Direct writing of sub-5 nm hafnium diboride metallic nanostructures

Wei Ye, Pamela A. Peña Martin, Navneet Kumar, Scott R. Daly, Angus Rockett, John R. Abelson, Gregory S. Girolami, Joseph W. Lyding

Research output: Contribution to journal › Article › peer-review

Abstract

Sub-5 nm metallic hafnium diboride (HfB₂) nanostructures were directly written onto Si(100)-2×1:H surfaces using ultrahigh vacuum scanning tunneling microscope (UHV-STM) electron beam induced deposition (EBID) of a carbon-free precursor molecule, tetrakis(tetrahydroborato)hafnium, Hf(BH₄)₄. Scanning tunneling spectroscopy data confirm the metallic nature of the HfB₂ nanostructures, which have been written down to lateral dimensions of ∼2.5 nm. To our knowledge, this is the first demonstration of sub-5 nm metallic nanostructures in an STM-EBID experiment.

Original language	English (US)
Pages (from-to)	6818-6824
Number of pages	7
Journal	ACS Nano
Volume	4
Issue number	11
DOIs	https://doi.org/10.1021/nn1018522
State	Published - Nov 23 2010

Keywords

Electron beam induced deposition
Hafnium diboride
Nanodot
Nanowire
Scanning tunneling microscopy
Scanning tunneling spectroscopy
Sub-5 nm

ASJC Scopus subject areas

Engineering(all)
Materials Science(all)
Physics and Astronomy(all)

Online availability

10.1021/nn1018522

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abstract = "Sub-5 nm metallic hafnium diboride (HfB2) nanostructures were directly written onto Si(100)-2×1:H surfaces using ultrahigh vacuum scanning tunneling microscope (UHV-STM) electron beam induced deposition (EBID) of a carbon-free precursor molecule, tetrakis(tetrahydroborato)hafnium, Hf(BH4)4. Scanning tunneling spectroscopy data confirm the metallic nature of the HfB2 nanostructures, which have been written down to lateral dimensions of ∼2.5 nm. To our knowledge, this is the first demonstration of sub-5 nm metallic nanostructures in an STM-EBID experiment.",

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AU - Ye, Wei

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AU - Kumar, Navneet

AU - Daly, Scott R.

AU - Rockett, Angus

AU - Abelson, John R.

AU - Girolami, Gregory S.

AU - Lyding, Joseph W.

PY - 2010/11/23

Y1 - 2010/11/23

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Direct writing of sub-5 nm hafnium diboride metallic nanostructures

Abstract

Keywords

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