Direct writing of sub-5 nm hafnium diboride metallic nanostructures

Wei Ye, Pamela A. Peña Martin, Navneet Kumar, Scott R. Daly, Angus A. Rockett, John R Abelson, Gregory S Girolami, Joseph W Lyding

Research output: Contribution to journalArticle

Abstract

Sub-5 nm metallic hafnium diboride (HfB2) nanostructures were directly written onto Si(100)-2×1:H surfaces using ultrahigh vacuum scanning tunneling microscope (UHV-STM) electron beam induced deposition (EBID) of a carbon-free precursor molecule, tetrakis(tetrahydroborato)hafnium, Hf(BH4)4. Scanning tunneling spectroscopy data confirm the metallic nature of the HfB2 nanostructures, which have been written down to lateral dimensions of ∼2.5 nm. To our knowledge, this is the first demonstration of sub-5 nm metallic nanostructures in an STM-EBID experiment.

Original languageEnglish (US)
Pages (from-to)6818-6824
Number of pages7
JournalACS Nano
Volume4
Issue number11
DOIs
StatePublished - Nov 23 2010

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Hafnium
hafnium
Nanostructures
electron beams
scanning
Electron beams
ultrahigh vacuum
Scanning
microscopes
Ultrahigh vacuum
carbon
Microscopes
Demonstrations
Carbon
Spectroscopy
spectroscopy
molecules
Molecules
Experiments

Keywords

  • Electron beam induced deposition
  • Hafnium diboride
  • Nanodot
  • Nanowire
  • Scanning tunneling microscopy
  • Scanning tunneling spectroscopy
  • Sub-5 nm

ASJC Scopus subject areas

  • Engineering(all)
  • Materials Science(all)
  • Physics and Astronomy(all)

Cite this

Ye, W., Peña Martin, P. A., Kumar, N., Daly, S. R., Rockett, A. A., Abelson, J. R., ... Lyding, J. W. (2010). Direct writing of sub-5 nm hafnium diboride metallic nanostructures. ACS Nano, 4(11), 6818-6824. https://doi.org/10.1021/nn1018522

Direct writing of sub-5 nm hafnium diboride metallic nanostructures. / Ye, Wei; Peña Martin, Pamela A.; Kumar, Navneet; Daly, Scott R.; Rockett, Angus A.; Abelson, John R; Girolami, Gregory S; Lyding, Joseph W.

In: ACS Nano, Vol. 4, No. 11, 23.11.2010, p. 6818-6824.

Research output: Contribution to journalArticle

Ye, W, Peña Martin, PA, Kumar, N, Daly, SR, Rockett, AA, Abelson, JR, Girolami, GS & Lyding, JW 2010, 'Direct writing of sub-5 nm hafnium diboride metallic nanostructures', ACS Nano, vol. 4, no. 11, pp. 6818-6824. https://doi.org/10.1021/nn1018522
Ye W, Peña Martin PA, Kumar N, Daly SR, Rockett AA, Abelson JR et al. Direct writing of sub-5 nm hafnium diboride metallic nanostructures. ACS Nano. 2010 Nov 23;4(11):6818-6824. https://doi.org/10.1021/nn1018522
Ye, Wei ; Peña Martin, Pamela A. ; Kumar, Navneet ; Daly, Scott R. ; Rockett, Angus A. ; Abelson, John R ; Girolami, Gregory S ; Lyding, Joseph W. / Direct writing of sub-5 nm hafnium diboride metallic nanostructures. In: ACS Nano. 2010 ; Vol. 4, No. 11. pp. 6818-6824.
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