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Direct-write polymer nanolithography in ultra-high vacuum
Woo Kyung Lee, Minchul Yang, Arnaldo R. Laracuente, William P. King, Lloyd J. Whitman, Paul E. Sheehan
- Mechanical Science and Engineering
- Grainger College of Engineering
- Materials Science and Engineering
- Materials Research Lab
- Information Trust Institute
- Micro and Nanotechnology Lab
- Electrical and Computer Engineering
- Beckman Institute for Advanced Science and Technology
- Biomedical and Translational Sciences
Research output: Contribution to journal › Letter › peer-review