Direct Observation of Dopants Distribution and Diffusion in GaAs Planar Nanowires with Atom Probe Tomography

Jiangtao Qu, Wonsik Choi, Parsian Katal Mohseni, Xiuling Li, Yingjie Zhang, Hansheng Chen, Simon Ringer, Rongkun Zheng

Research output: Contribution to journalArticle

Abstract

Intentional and unintentional doping in semiconductor nanowires undoubtedly have significant impact on the device performance. However, spatially resolved precise determination of dopant concentration is challenging due to insufficient sensitivity and resolution of conventional techniques. In this paper, quantitative 3D distribution of Si and Zn dopants in planar GaAs nanowires and their interface with AlGaAs film underneath are obtained by using a unique atom probe tomography technique, providing critical insights for the growth and potential applications of these nanowires.

Original languageEnglish (US)
Pages (from-to)26244-26250
Number of pages7
JournalACS Applied Materials and Interfaces
Volume8
Issue number39
DOIs
StatePublished - Oct 5 2016

Keywords

  • APT
  • FIB
  • NWs
  • doping
  • planar GaAs nanowires
  • tomography

ASJC Scopus subject areas

  • Materials Science(all)

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