Direct heterointegration of III-V materials on group IV substrates

D. A. Ahmari, B. M. McDermott, S. G. Thomas, B. J. Roof, Q. J. Hartmann, X. Li

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This work describes using metal-organic chemical vapor deposition (MOCVD) to directly deposit III-V materials on Si/Ge-based substrates, with the primary focus being the methodology used to develop a manufacturable heterointegration process.

Original languageEnglish (US)
Title of host publicationSiGe, Ge, and Related Compounds 4
Subtitle of host publicationMaterials, Processing, and Devices
PublisherElectrochemical Society Inc.
Pages849-857
Number of pages9
Edition6
ISBN (Electronic)9781607681755
ISBN (Print)9781566778251
DOIs
StatePublished - 2010

Publication series

NameECS Transactions
Number6
Volume33
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

ASJC Scopus subject areas

  • Engineering(all)

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