TY - JOUR
T1 - Direct fabrication of arbitrary-shaped ferroelectric nanostructures on plastic, glass, and silicon substrates
AU - Kim, Suenne
AU - Bastani, Yaser
AU - Lu, Haidong
AU - King, William Paul
AU - Marder, Seth
AU - Sandhage, Kenneth H.
AU - Gruverman, Alexei
AU - Riedo, Elisa
AU - Bassiri-Gharb, Nazanin
PY - 2011/9/1
Y1 - 2011/9/1
N2 - A complementary metal-oxide-semiconductor (CMOS)-compatible method for the direct fabrication of arbitrary-shaped Pb(Zr0.52Ti 0.48)O3and PbTiO3 ferroelectric/piezoelectric nanostructures on plastic, silicon, and soda-lime glass substrates is reported. Thermochemical nanolithography is used to induce nanoscale crystallization of sol-gel precursor films. Ferroelectric lines with width ∼30 nm, spheres with diameter ∼10 nm, and densities up to 213 Gb in-2 are produced.
AB - A complementary metal-oxide-semiconductor (CMOS)-compatible method for the direct fabrication of arbitrary-shaped Pb(Zr0.52Ti 0.48)O3and PbTiO3 ferroelectric/piezoelectric nanostructures on plastic, silicon, and soda-lime glass substrates is reported. Thermochemical nanolithography is used to induce nanoscale crystallization of sol-gel precursor films. Ferroelectric lines with width ∼30 nm, spheres with diameter ∼10 nm, and densities up to 213 Gb in-2 are produced.
KW - ferroelectric materials
KW - nanomanufacturing
KW - piezoelectric materials
KW - thermochemical nanolithography
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U2 - 10.1002/adma.201101991
DO - 10.1002/adma.201101991
M3 - Article
AN - SCOPUS:80052156425
SN - 0935-9648
VL - 23
SP - 3786
EP - 3790
JO - Advanced Materials
JF - Advanced Materials
IS - 33
ER -