Direct fabrication of 3D periodic inorganic microstructures using conformal phase masks

Keyphrases

• 3D Microstructure 50%
• Acid-catalyzed Condensation 50%
• Chemically Amplified 50%
• Colloidal Particles 50%
• Design Condition 50%
• Direct Fabrication 100%
• Exposure Conditions 50%
• Helical Array 50%
• Mask-free 50%
• Microstructure 100%
• Phase Mask 100%
• Photonic Crystal 50%
• Proximity Field Nanopatterning 50%
• Silanol 50%

Material Science

• Photonic Crystal 100%