Direct e-beam writing of colors on (AgI)x(AgPO3)1-x glass

Kyle E. Jacobs, Placid M. Ferreira

Research output: Contribution to journalArticlepeer-review

Abstract

Direct writing of color patterns is investigated in (AgI)x(AgPO3)1-x ionically conductive glasses through the use of an electron beam. A range of glasses from x = 0-0.5 are explored to represent varying levels of ionic conductivity and the gamut of colors possible depending on substrate composition. For AgIAgPO3, writing capabilities are found to include a linear, tunable optical density of patterns in transmission, as well as diffraction limited color resolution in reflection. Writing at multiple currents, beam energies, and raster techniques are performed to explore the sensitivity to variations of process parameters. With advanced multiple beam voltage patterning techniques, the authors demonstrate the capability to both generate new colors as well as erase patterns previously created with this process.

Original languageEnglish (US)
Article number041605
JournalJournal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
Volume34
Issue number4
DOIs
StatePublished - Jul 1 2016

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering
  • Materials Chemistry

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