Direct characterization of hydrodynamic loading on a microelectromechanical systems microstructure

Ali Mehrnezhad, Rashid Bashir, Kidong Park

Research output: Contribution to journalArticle

Abstract

Hydrodynamic loading greatly affects resonant characteristic of microfabricated structures immersed in a viscous fluid. In this letter, we demonstrate a technique to measure hydrodynamic loading on a MEMS resonator in a broad range of actuation frequency. The extracted hydrodynamic loading is in a good agreement with an analytical solution of an oscillating sphere, and a highly accurate model is developed for the hydrodynamic loading of the resonator. The developed technique can directly characterize the hydrodynamic loading of a microstructure with an arbitrary geometry and will facilitate the optimization of MEMS devices and AFM probes operating in a viscous fluid.

Original languageEnglish (US)
Article number114101
JournalApplied Physics Letters
Volume108
Issue number11
DOIs
StatePublished - Mar 14 2016

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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