Hydrodynamic loading greatly affects resonant characteristic of microfabricated structures immersed in a viscous fluid. In this letter, we demonstrate a technique to measure hydrodynamic loading on a MEMS resonator in a broad range of actuation frequency. The extracted hydrodynamic loading is in a good agreement with an analytical solution of an oscillating sphere, and a highly accurate model is developed for the hydrodynamic loading of the resonator. The developed technique can directly characterize the hydrodynamic loading of a microstructure with an arbitrary geometry and will facilitate the optimization of MEMS devices and AFM probes operating in a viscous fluid.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)