Direct characterization of hydrodynamic loading on a microelectromechanical systems microstructure

Ali Mehrnezhad, Rashid Bashir, Kidong Park

Research output: Contribution to journalArticle

Abstract

Hydrodynamic loading greatly affects resonant characteristic of microfabricated structures immersed in a viscous fluid. In this letter, we demonstrate a technique to measure hydrodynamic loading on a MEMS resonator in a broad range of actuation frequency. The extracted hydrodynamic loading is in a good agreement with an analytical solution of an oscillating sphere, and a highly accurate model is developed for the hydrodynamic loading of the resonator. The developed technique can directly characterize the hydrodynamic loading of a microstructure with an arbitrary geometry and will facilitate the optimization of MEMS devices and AFM probes operating in a viscous fluid.

Original languageEnglish (US)
Article number114101
JournalApplied Physics Letters
Volume108
Issue number11
DOIs
StatePublished - Mar 14 2016

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microelectromechanical systems
hydrodynamics
microstructure
viscous fluids
resonators
actuation
atomic force microscopy
optimization
probes
geometry

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Direct characterization of hydrodynamic loading on a microelectromechanical systems microstructure. / Mehrnezhad, Ali; Bashir, Rashid; Park, Kidong.

In: Applied Physics Letters, Vol. 108, No. 11, 114101, 14.03.2016.

Research output: Contribution to journalArticle

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