@inproceedings{d1655164998a46d290cf9f4aab982880,
title = "Digital deterministic control of slow light in photonic crystal waveguide membranes through atomic layer deposition",
abstract = "We present for the first time digital and deterministic control of slow-light in photonic crystal silicon membranes through atomic layer deposition. Supported by ab initio calculations and our earlier advancements, the tuning of the slow group indices and higher-order dispersion characteristics are observed in the chip-scale Mach-Zehnder interferometers, along with control of the surface-state coupling. This deterministic control is a CMOS process that unambiguously tunes the slow-light dispersion for ultrahigh-bandwidth delay lines and nonlinear nanophotonics.",
author = "Chen, {Charlton J.} and Husko, {Chad A.} and Inanc Meric and Shepard, {Ken L.} and Chee, {Wei Wong} and Green, {William M.J.} and Vlasov, {Yurii A.} and Solomon Assefa",
year = "2009",
month = nov,
day = "16",
language = "English (US)",
isbn = "9781557528698",
series = "2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum Electronics and Laser Science Conference, CLEO/QELS 2009",
booktitle = "2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum Electronics and Laser Science Conference, CLEO/QELS 2009",
note = "2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum Electronics and Laser Science Conference, CLEO/QELS 2009 ; Conference date: 02-06-2009 Through 04-06-2009",
}