Digital deterministic control of slow light in photonic crystal waveguide membranes through atomic layer deposition

Charlton J. Chen, Chad A. Husko, Inanc Meric, Ken L. Shepard, Wei Wong Chee, William M.J. Green, Yurii A. Vlasov, Solomon Assefa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present for the first time digital and deterministic control of slow-light in photonic crystal silicon membranes through atomic layer deposition. Supported by ab initio calculations and our earlier advancements, the tuning of the slow group indices and higher-order dispersion characteristics are observed in the chip-scale Mach-Zehnder interferometers, along with control of the surface-state coupling. This deterministic control is a CMOS process that unambiguously tunes the slow-light dispersion for ultrahigh-bandwidth delay lines and nonlinear nanophotonics.

Original languageEnglish (US)
Title of host publication2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum Electronics and Laser Science Conference, CLEO/QELS 2009
StatePublished - 2009
Externally publishedYes
Event2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum Electronics and Laser Science Conference, CLEO/QELS 2009 - Baltimore, MD, United States
Duration: Jun 2 2009Jun 4 2009

Publication series

Name2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum Electronics and Laser Science Conference, CLEO/QELS 2009

Other

Other2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum Electronics and Laser Science Conference, CLEO/QELS 2009
Country/TerritoryUnited States
CityBaltimore, MD
Period6/2/096/4/09

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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