Diffusion barrier characteristics of zirconium diboride films grown by remote plasma CVD

J. Sung, D. M. Goedde, G. S. Girolami, J. R. Abelson

Research output: Contribution to journal › Conference article › peer-review

Fingerprint

Dive into the research topics of 'Diffusion barrier characteristics of zirconium diboride films grown by remote plasma CVD'. Together they form a unique fingerprint.

Keyphrases

Engineering

Earth and Planetary Sciences

Physics