@inproceedings{d2723f426a4944ce953c99ce6f7106ac,
title = "Diffraction phase microscopy for wafer inspection",
abstract = "We built a compact, common path, laser epi-illumination diffraction phase microscope (epi-DPM) for defect detection on a patterned semiconductor wafer. The wafer's underlying structure and buried defects with ∼ 100 nm size were measured.",
keywords = "diffraction, microscope, phase microscope, wafer inspection",
author = "Renjie Zhou and Chris Edwards and Gabriel Popescu and Goddard, {Lynford L.}",
year = "2012",
doi = "10.1109/IPCon.2012.6358786",
language = "English (US)",
isbn = "9781457707315",
series = "2012 IEEE Photonics Conference, IPC 2012",
pages = "644--645",
booktitle = "2012 IEEE Photonics Conference, IPC 2012",
note = "25th IEEE Photonics Conference, IPC 2012 ; Conference date: 23-09-2012 Through 27-09-2012",
}