Diffraction phase microscopy for wafer inspection

Renjie Zhou; Chris Edwards; Gabriel Popescu; Lynford L Goddard

doi:10.1109/IPCon.2012.6358786

Diffraction phase microscopy for wafer inspection

Renjie Zhou, Chris Edwards, Gabriel Popescu, Lynford L Goddard

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We built a compact, common path, laser epi-illumination diffraction phase microscope (epi-DPM) for defect detection on a patterned semiconductor wafer. The wafer's underlying structure and buried defects with ∼ 100 nm size were measured.

Original language	English (US)
Title of host publication	2012 IEEE Photonics Conference, IPC 2012
Pages	644-645
Number of pages	2
DOIs	https://doi.org/10.1109/IPCon.2012.6358786
State	Published - Dec 1 2012
Event	25th IEEE Photonics Conference, IPC 2012 - Burlingame, CA, United States Duration: Sep 23 2012 → Sep 27 2012

Other

Other	25th IEEE Photonics Conference, IPC 2012
Country/Territory	United States
City	Burlingame, CA
Period	9/23/12 → 9/27/12

Keywords

diffraction
microscope
phase microscope
wafer inspection

ASJC Scopus subject areas

Electrical and Electronic Engineering

Access to Document

10.1109/IPCon.2012.6358786

Cite this

@inproceedings{d2723f426a4944ce953c99ce6f7106ac,

title = "Diffraction phase microscopy for wafer inspection",

abstract = "We built a compact, common path, laser epi-illumination diffraction phase microscope (epi-DPM) for defect detection on a patterned semiconductor wafer. The wafer's underlying structure and buried defects with ∼ 100 nm size were measured.",

keywords = "diffraction, microscope, phase microscope, wafer inspection",

author = "Renjie Zhou and Chris Edwards and Gabriel Popescu and Goddard, {Lynford L}",

year = "2012",

month = dec,

day = "1",

doi = "10.1109/IPCon.2012.6358786",

language = "English (US)",

isbn = "9781457707315",

pages = "644--645",

booktitle = "2012 IEEE Photonics Conference, IPC 2012",

note = "25th IEEE Photonics Conference, IPC 2012 ; Conference date: 23-09-2012 Through 27-09-2012",

}

TY - GEN

T1 - Diffraction phase microscopy for wafer inspection

AU - Zhou, Renjie

AU - Edwards, Chris

AU - Popescu, Gabriel

AU - Goddard, Lynford L

PY - 2012/12/1

Y1 - 2012/12/1

N2 - We built a compact, common path, laser epi-illumination diffraction phase microscope (epi-DPM) for defect detection on a patterned semiconductor wafer. The wafer's underlying structure and buried defects with ∼ 100 nm size were measured.

AB - We built a compact, common path, laser epi-illumination diffraction phase microscope (epi-DPM) for defect detection on a patterned semiconductor wafer. The wafer's underlying structure and buried defects with ∼ 100 nm size were measured.

KW - diffraction

KW - microscope

KW - phase microscope

KW - wafer inspection

UR - http://www.scopus.com/inward/record.url?scp=84871788001&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84871788001&partnerID=8YFLogxK

U2 - 10.1109/IPCon.2012.6358786

DO - 10.1109/IPCon.2012.6358786

M3 - Conference contribution

AN - SCOPUS:84871788001

SN - 9781457707315

SP - 644

EP - 645

BT - 2012 IEEE Photonics Conference, IPC 2012

T2 - 25th IEEE Photonics Conference, IPC 2012

Y2 - 23 September 2012 through 27 September 2012

ER -

Diffraction phase microscopy for wafer inspection

Abstract

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Keywords

ASJC Scopus subject areas

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