Dielectrophoresis and electrohydrodynamics-mediated fluidic assembly of silicon resistors

S. W. Lee, R. Bashir

Research output: Contribution to journalArticlepeer-review

Abstract

Self-assembly of silicon resistors and blocks on microelectrode structure by dielectrophoretic and electrohydrodynamic effects was demonstrated and explained. It was demonstrated that the silicon resistor with Au contacts can be assembled precisely within two electrodes and the devices can be held at the same position during the evaporation process. I-V characteristics of the assembled device were measured on devices after drying and annealing the contacts.

Original languageEnglish (US)
Pages (from-to)3833-3835
Number of pages3
JournalApplied Physics Letters
Volume83
Issue number18
DOIs
StatePublished - Nov 3 2003
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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