Self-assembly of silicon resistors and blocks on microelectrode structure by dielectrophoretic and electrohydrodynamic effects was demonstrated and explained. It was demonstrated that the silicon resistor with Au contacts can be assembled precisely within two electrodes and the devices can be held at the same position during the evaporation process. I-V characteristics of the assembled device were measured on devices after drying and annealing the contacts.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)