Dielectrophoresis and chemically mediated directed self-assembly of micrometer-scale three-terminal metal oxide semiconductor field-effect transistors

Keyphrases

• Dielectrophoresis 100%
• MOSFET 100%
• Directed Self-assembly 100%
• Micrometer Scale 100%
• Three-terminal 100%
• Silicon Devices 50%
• Single Crystal 50%
• Micro-electro-mechanical Systems 50%
• Heterogeneous Integration 50%
• Parasitic Resistance 50%
• 3D Integration 50%
• Electronic Integration 50%
• Chemical Molecule 50%
• Drying Process 50%
• Low Efficiency 50%

Material Science

• Metal-Oxide-Semiconductor Field-Effect Transistor 100%
• Self Assembly 100%
• Microelectromechanical System 50%
• Silicon Device 50%
• Single Crystal 50%

Engineering

• Metal-Oxide-Semiconductor Field-Effect Transistor 100%
• Microelectromechanical System 50%
• Silicon Device 50%
• Parasitic Resistance 50%
• Drying Method 50%