Development of a wide-tuning-range two-parallel-plate tunable capacitor for integrated wireless communication systems

Jun Zou, Chang Liu, José E. Schutt-Ainé

Research output: Contribution to journalArticle

Abstract

This paper reports on the development of a micromachined parallel-plate tunable capacitor with a wide tuning range. Different from conventional two-parallel-plate tunable capacitors, this tunable capacitor consists of one suspended top plate and two fixed bottom plates. One fixed plate and the top plate form a variable capacitor, while the other one provides necessary electrostatic actuation. Among the fabricated prototype devices, a maximum controllable tuning range of 69.8%@1 MHz has been obtained experimentally, exceeding the theoretical limit (50%) of conventional two-parallel-plate tunable capacitors. A component quality factor (Q) of 30@5 GHz and a self-resonant frequency far beyond 5 GHz have been achieved. The fabrication process is compatible with the existing standard IC (integrated circuit) technology, which makes it suitable for integrated wireless communication applications.

Original languageEnglish (US)
Pages (from-to)322-329
Number of pages8
JournalInternational Journal of RF and Microwave Computer-Aided Engineering
Volume11
Issue number5
DOIs
StatePublished - Sep 1 2001

Keywords

  • MEMS
  • Tunable capacitor
  • Varactor
  • Wireless communication

ASJC Scopus subject areas

  • Computer Science Applications
  • Computer Graphics and Computer-Aided Design
  • Electrical and Electronic Engineering

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