Development of a wide tuning range MEMS tunable capacitor for wireless communication systems

J. Zou, C. Liu, J. Schutt-Aine, J. Chen, S. M. Kang

Research output: Contribution to journalConference articlepeer-review


We present results on the development of a novel micromachined parallel-plate tunable capacitor with a wide tuning range. Different from conventional two-parallel-plate tunable capacitors, this novel tunable capacitor consists of one suspended top plate and two fixed bottom plates. One of the two fixed plates and the top plate form a variable capacitor, where as the other fixed plate and the top plate are used to provide electrostatic actuation for capacitance tuning. For the fabricated prototype tunable capacitors, a maximum controllable tuning range of 69.8% has been achieved experimentally, exceeding the theoretical tuning range limit (50%) of conventional two-parallel-plate tunable capacitors. This novel tunable capacitor also exhibits very low return loss (< 0.6dB between 45 MHz and 10GHz). Its fabrication process is completely compatible with the existing standard IC (integrated circuit) fabrication technology, which makes it useful in integrated wireless communication systems.

Original languageEnglish (US)
Pages (from-to)403-406
Number of pages4
JournalTechnical Digest - International Electron Devices Meeting
StatePublished - 2000
Event2000 IEEE International Electron Devices Meeting - San Francisco, CA, United States
Duration: Dec 10 2000Dec 13 2000

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry


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