@inproceedings{3610f94103cb46828b382e33a67f0f6c,
title = "Development of 90nm InGaAs HEMTs and benchmarking logic performance with Si CMOS",
abstract = "We have developed 90nm In0.7Ga0.3As channel HEMTs, directly measured of DC and RF characteristics, and performed microwave modeling for both 90nm Si CMOS and HEMT for benchmarking logic performance for future design layout and process improvement.",
keywords = "CMOS, Device modeling, HEMTs, Microwave measurements",
author = "Cheng, {Kuang Yu} and Doris Chan and Fei Tan and Huiming Xu and Milton Feng and Ko, {Chih Hsin} and Clement Wann",
year = "2010",
doi = "10.1109/CSICS.2010.5619674",
language = "English (US)",
isbn = "9781424474387",
series = "Technical Digest - IEEE Compound Semiconductor Integrated Circuit Symposium, CSIC",
booktitle = "2010 IEEE Compound Semiconductor Integrated Circuit Symposium, CSICS 2010 - Technical Digest 2010",
note = "2010 32nd IEEE Compound Semiconductor Integrated Circuit Symposium, CSICS 2010 ; Conference date: 03-10-2010 Through 06-10-2010",
}