Development and characterization of micromachined hollow cathode plasma display devices

Jack Chen, Sung Jin Park, Zhifang Fan, J. Gary Eden, Chang Liu

Research output: Contribution to journalArticlepeer-review

Abstract

In this paper, we report the development of hollow-cathode micro plasma devices made using micromachining techniques. Compared with larger discharge devices, micromachined discharge devices operate at much higher pressures, up to 1 atm. Linear current-voltage relationships are obtained, potentially simplifying the control electronics for such devices. The size of micro-machined discharge units is reduced and the distribution of sizes and light intensity in an array is more uniform relative to previous devices.

Original languageEnglish (US)
Pages (from-to)536-543
Number of pages8
JournalJournal of Microelectromechanical Systems
Volume11
Issue number5
DOIs
StatePublished - Oct 2002

Keywords

  • Hollow cathode
  • Microdischarge
  • Micromachine

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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