In this paper, we report the development of hollow-cathode micro plasma devices made using micromachining techniques. Compared with larger discharge devices, micromachined discharge devices operate at much higher pressures, up to 1 atm. Linear current-voltage relationships are obtained, potentially simplifying the control electronics for such devices. The size of micro-machined discharge units is reduced and the distribution of sizes and light intensity in an array is more uniform relative to previous devices.
- Hollow cathode
ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering