Determination of elastic properties of MEMS materials using inverse solutions

Sungwoo Cho, Jaime F. Cárdenas-Garcia, Ioannis Chasiotis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fingerprint

Dive into the research topics of 'Determination of elastic properties of MEMS materials using inverse solutions'. Together they form a unique fingerprint.

Keyphrases

Engineering

Material Science