Determination of elastic properties of MEMS materials using inverse solutions

Sungwoo Cho, Jaime F. Cárdenas-Garcia, Ioannis Chasiotis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The inverse solution of the problem of a hole in a plate was employed together with nanoscale deformation measurements on perforated freestanding MEMS-scale specimens to obtain the isotropic elastic constants of polycrystalline silicon. This method relied on full-field nanometric displacements acquired in the vicinity of circular, micron-sized perforations. The results for the elastic modulus and Poisson's ratio obtained this way agreed well with those from uniform tension experiments. The nanoscale displacements were obtained through Digital Image Correlation (DIG) analysis of Atomic Force Microscopy (AFM) images acquired at various applied loads. The accuracy in determining the elastic constants depended on the selection of the location for the acquisition of local displacements at the hole perimeter. Using numerical analysis the area of maximum compression provided the most accurate results for both Young's modulus (E= 155±6.6 GPa) and Poisson's ratio (v= 0.20±0.04) that agreed very well with measurements obtained from uniform tension tests. The advantage of this inverse problem approach is that both isotropic elastic constants were recovered from a very small material domain (10×10 um 2) with knowledge of the displacement field in only one direction.

Original languageEnglish (US)
Title of host publicationProceedings of the 2005 SEM Annual Conference and Exposition on Experimental and Applied Mechanics
Pages1669-1673
Number of pages5
StatePublished - Dec 1 2005
Externally publishedYes
Event2005 SEM Annual Conference and Exposition on Experimental and Applied Mechanics - Portland, OR, United States
Duration: Jun 7 2005Jun 9 2005

Publication series

NameProceedings of the 2005 SEM Annual Conference and Exposition on Experimental and Applied Mechanics

Other

Other2005 SEM Annual Conference and Exposition on Experimental and Applied Mechanics
CountryUnited States
CityPortland, OR
Period6/7/056/9/05

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Cho, S., Cárdenas-Garcia, J. F., & Chasiotis, I. (2005). Determination of elastic properties of MEMS materials using inverse solutions. In Proceedings of the 2005 SEM Annual Conference and Exposition on Experimental and Applied Mechanics (pp. 1669-1673). (Proceedings of the 2005 SEM Annual Conference and Exposition on Experimental and Applied Mechanics).