Detection of proteins and intact microorganisms using microfabricated flexural plate silicon resonator arrays

Jane Pepper, Richard Noring, Mark Klempner, Brian Cunningham, Anthony Petrovich, Robert Bousquet, Christopher Clapp, Jeanne Brady, Brenda Hugh

Research output: Contribution to journalArticlepeer-review


We are developing biosensor arrays that are based on microfabricated silicon flexural plate wave (FPW) resonators coated with molecular recognition chemistry. The resonators within the micro-chemical analysis array (μCANARY) are micro-electromechanical (MEM) sensors that have been miniaturized to allow many independently addressable sensors to be integrated within a single silicon chip. The target analyte of an individual sensor within the chip is selectively detected by depositing molecular recognition component (or "coating") onto the sensor surface, and monitoring changes in the frequency and phase of the resonance as the coating interacts with the analyte. The ultimate goal of this project is integration of hundreds of miniature resonators within a single chip for detection of biological species. As proof of concept demonstration, we describe here the detection of proteins and intact microorganisms using 2-element and 8-element μCANARY sensor chips and address electronics. Preliminary results of sensitivity, selectivity, and surface regeneration methods of the sensor are presented. Detection of proteins and microorganisms with the μCANARY sensor were confirmed by optical measurements.

Original languageEnglish (US)
Pages (from-to)565-575
Number of pages11
JournalSensors and Actuators, B: Chemical
Issue number3
StatePublished - Dec 1 2003


  • Biosensor
  • FPW sensor
  • MEMS
  • Microorganism
  • Protein
  • Sensor array

ASJC Scopus subject areas

  • Analytical Chemistry
  • Electrochemistry
  • Electrical and Electronic Engineering


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