Abstract
The use of selectively oxidized current apertures within vertical cavity surface emitting lasers (VCSELs) has produced dramatic performance advances due to improved electrical and optical confinement, as compared to other VCSEL structures. Moreover, with better understanding of the wet oxidation process, improved control in the fabrication of buried oxide apertures within VCSELs can be pursued to address specific laser properties. This findings are illustrated by the oxide position and thickness which influence the VCSEL optical loss. It was shown that the profile of buried oxide apertures within selectively oxidized VCSELs is influenced by the composition of surrounding layers, which, in turn, affects the VCSEL performance.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 179-180 |
| Number of pages | 2 |
| Journal | Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS |
| Volume | 2 |
| State | Published - 1998 |
| Externally published | Yes |
| Event | Proceedings of the 1998 11th Annual Meeting IEEE Lasers and Electro-Optics Society, LEOS. Part 2 (of 2) - Orlando, FL, USA Duration: Dec 1 1998 → Dec 4 1998 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering