Design of high precision high bandwidth and reliable nanopositioning systems

Srinivasa Salapaka, Abu Sebastian

Research output: Contribution to conferencePaper

Abstract

In this paper, we present a paradigm which prescribes a procedure for a systematic design, analysis and development of nanopositioning devices. In this effort, we have used many tools from modern control theory to model devices, to quantify device resolution, bandwidth, range, and robustness, and to tackle undesirable nonlinear effects such as hysteresis and creep. The implementation of this procedure for the simultaneous achievement of robustness, high precision, and high bandwidth objectives is presented. The merits of the paradigm are demonstrated through experimental results.

Original languageEnglish (US)
Pages1395-1409
Number of pages15
DOIs
StatePublished - Jan 1 2003
Externally publishedYes
Event2003 ASME International Mechanical Engineering Congress - Washington, DC., United States
Duration: Nov 15 2003Nov 21 2003

Other

Other2003 ASME International Mechanical Engineering Congress
CountryUnited States
CityWashington, DC.
Period11/15/0311/21/03

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ASJC Scopus subject areas

  • Mechanical Engineering
  • Software

Cite this

Salapaka, S., & Sebastian, A. (2003). Design of high precision high bandwidth and reliable nanopositioning systems. 1395-1409. Paper presented at 2003 ASME International Mechanical Engineering Congress, Washington, DC., United States. https://doi.org/10.1115/IMECE2003-55554