Abstract

This work presents a stochastic framework based on stochastic collocation approach to quantify the effect of uncertain parameters on the performance of electrostatic MEMS devices. We consider an example of a MEMS switch to demonstrate that the proposed methodology can be used to design effective and reliable MEMS devices. The approach is straightforward to implement and can be orders of magnitude faster than the Monte Carlo method.

Original languageEnglish (US)
Title of host publication2008 Solid-State Sensors, Actuators, and Microsystems Workshop
EditorsKimberly L. Turner, Leland Spangler
PublisherTransducer Research Foundation
Pages166-169
Number of pages4
ISBN (Electronic)0964002477, 9780964002470
DOIs
StatePublished - Jan 1 2008
Event2008 Solid-State Sensors, Actuators, and Microsystems Workshop - Hilton Head Island, United States
Duration: Jun 1 2008Jun 5 2008

Publication series

NameTechnical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Conference

Conference2008 Solid-State Sensors, Actuators, and Microsystems Workshop
CountryUnited States
CityHilton Head Island
Period6/1/086/5/08

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Hardware and Architecture

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  • Cite this

    Agarwal, N., & Aluru, N. R. (2008). Design of electrostatically actuated mems under uncertainties. In K. L. Turner, & L. Spangler (Eds.), 2008 Solid-State Sensors, Actuators, and Microsystems Workshop (pp. 166-169). (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop). Transducer Research Foundation. https://doi.org/10.31438/trf.hh2008.45