Design methodologies for robust nano-positioning

Abu Sebastian, Srinivasa M. Salapaka

Research output: Contribution to journalArticlepeer-review


In this paper, we present a systematic control design and analysis for a two-dimensional nano-positioner. The primary emphasis of the paper is on the robustness of the closed-loop device as these flexure-stage-based, piezoactuated nano-positioners are nonlinear and operate in diverse conditions. To this end, we have used many tools from modern control theory to model devices and to quantify device resolution, bandwidth, and robustness. The implementation of this procedure for the simultaneous achievement of the objectives of robustness, high precision and high bandwidth is presented. The merits of the paradigm are demonstrated through experimental results.

Original languageEnglish (US)
Pages (from-to)868-876
Number of pages9
JournalIEEE Transactions on Control Systems Technology
Issue number6
StatePublished - Nov 2005


  • Atomic force microscopy
  • Flexure stages
  • Glover-McFarlane design
  • Nano-positioning
  • Piezoactuation
  • Robust control

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering


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