Design, fabrication, and performance of infrared and visible vertical-cavity surface-emitting lasers

Weng W. Chow; Kent D. Choquette; Mary H. Crawford; Kevin L. Lear; G. Ronald Hadley

doi:10.1109/3.631287

Design, fabrication, and performance of infrared and visible vertical-cavity surface-emitting lasers

Weng W. Chow, Kent D. Choquette, Mary H. Crawford, Kevin L. Lear, G. Ronald Hadley

Research output: Contribution to journal › Article › peer-review

Abstract

This paper discusses the issues involving the design and fabrication of vertical-cavity surface-emitting lasers (VCSEL's). A review of the basic experimental structures is given, with emphasis on recent developments in distributed Bragg reflectors, gain media, as well as current and optical confinement techniques. The paper describes present VCSEL performance, in particular, those involving selective oxidation and visible wave-length operation.

Original language	English (US)
Pages (from-to)	1810-1823
Number of pages	14
Journal	IEEE Journal of Quantum Electronics
Volume	33
Issue number	10
DOIs	https://doi.org/10.1109/3.631287
State	Published - Oct 1997
Externally published	Yes

Keywords

Optoelectronic devices
Semiconductor device fabrication
Semiconductor lasers

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Electrical and Electronic Engineering

Online availability

10.1109/3.631287

Library availability

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title = "Design, fabrication, and performance of infrared and visible vertical-cavity surface-emitting lasers",

abstract = "This paper discusses the issues involving the design and fabrication of vertical-cavity surface-emitting lasers (VCSEL's). A review of the basic experimental structures is given, with emphasis on recent developments in distributed Bragg reflectors, gain media, as well as current and optical confinement techniques. The paper describes present VCSEL performance, in particular, those involving selective oxidation and visible wave-length operation.",

keywords = "Optoelectronic devices, Semiconductor device fabrication, Semiconductor lasers",

author = "Chow, {Weng W.} and Choquette, {Kent D.} and Crawford, {Mary H.} and Lear, {Kevin L.} and Hadley, {G. Ronald}",

note = "Funding Information: Manuscript received January 7, 1997; revised June 10, 1997. This work was supported by the U.S. Department of Energy under Contract DE-AC04-94AL85000. W. W. Chow, K. D. Choquette, M. H. Crawford, and G. R. Hadley are with Sandia National Laboratories, Albuquerque, NM 87185-0601 USA. K. L. Lear was with Sandia National Laboratories, Albuquerque, NM 87185-0601 USA. He is now with Micro Optical Devices, Inc., Albuquerque, NM 87109 USA. Publisher Item Identifier S 0018-9197(97)07074-7.",

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month = oct,

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AU - Choquette, Kent D.

AU - Crawford, Mary H.

AU - Lear, Kevin L.

AU - Hadley, G. Ronald

N1 - Funding Information: Manuscript received January 7, 1997; revised June 10, 1997. This work was supported by the U.S. Department of Energy under Contract DE-AC04-94AL85000. W. W. Chow, K. D. Choquette, M. H. Crawford, and G. R. Hadley are with Sandia National Laboratories, Albuquerque, NM 87185-0601 USA. K. L. Lear was with Sandia National Laboratories, Albuquerque, NM 87185-0601 USA. He is now with Micro Optical Devices, Inc., Albuquerque, NM 87109 USA. Publisher Item Identifier S 0018-9197(97)07074-7.

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AB - This paper discusses the issues involving the design and fabrication of vertical-cavity surface-emitting lasers (VCSEL's). A review of the basic experimental structures is given, with emphasis on recent developments in distributed Bragg reflectors, gain media, as well as current and optical confinement techniques. The paper describes present VCSEL performance, in particular, those involving selective oxidation and visible wave-length operation.

KW - Optoelectronic devices

KW - Semiconductor device fabrication

KW - Semiconductor lasers

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Design, fabrication, and performance of infrared and visible vertical-cavity surface-emitting lasers

Abstract

Keywords

ASJC Scopus subject areas

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