Design considerations for large MEMS

Muhammed T. Saif, Noel C. MacDonald

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

There has been an increasing need for the design and fabrication of large (few millimeters) MEMS made of micron-size features for a variety of applications. Mechanical design of large MEMS structures needs careful consideration of the forces developed during and after processing to ensure their survivability and reliable performance. forces generated to actuate a device, e.g., capacitive force, are well characterized. However, the forces developed due to conditions of processing, such as fluid forces, have not yet been fully characterized. In this paper, we propose simple models to estimate thermal and intrinsic stresses and the corresponding deformations of large MEMS, as well as fluid forces during wet processing. We also discuss the issue of stability of large MEMS during actuation.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsVijay K. Varadan
PublisherSociety of Photo-Optical Instrumentation Engineers
Pages93-104
Number of pages12
ISBN (Print)0819417971
StatePublished - Jan 1 1995
Externally publishedYes
EventSmart Structures and Materials 1995: Smart Electronics - San Diego, CA, USA
Duration: Mar 2 1995Mar 3 1995

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume2448
ISSN (Print)0277-786X

Other

OtherSmart Structures and Materials 1995: Smart Electronics
CitySan Diego, CA, USA
Period3/2/953/3/95

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Saif, M. T., & MacDonald, N. C. (1995). Design considerations for large MEMS. In V. K. Varadan (Ed.), Proceedings of SPIE - The International Society for Optical Engineering (pp. 93-104). (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 2448). Society of Photo-Optical Instrumentation Engineers.