Abstract
There has been an increasing need for the design and fabrication of large (few millimeters) MEMS made of micron-size features for a variety of applications. Mechanical design of large MEMS structures needs careful consideration of the forces developed during and after processing to ensure their survivability and reliable performance. forces generated to actuate a device, e.g., capacitive force, are well characterized. However, the forces developed due to conditions of processing, such as fluid forces, have not yet been fully characterized. In this paper, we propose simple models to estimate thermal and intrinsic stresses and the corresponding deformations of large MEMS, as well as fluid forces during wet processing. We also discuss the issue of stability of large MEMS during actuation.
| Original language | English (US) |
|---|---|
| Title of host publication | Proceedings of SPIE - The International Society for Optical Engineering |
| Editors | Vijay K. Varadan |
| Publisher | Society of Photo-Optical Instrumentation Engineers |
| Pages | 93-104 |
| Number of pages | 12 |
| ISBN (Print) | 0819417971 |
| State | Published - Jan 1 1995 |
| Externally published | Yes |
| Event | Smart Structures and Materials 1995: Smart Electronics - San Diego, CA, USA Duration: Mar 2 1995 → Mar 3 1995 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 2448 |
| ISSN (Print) | 0277-786X |
Other
| Other | Smart Structures and Materials 1995: Smart Electronics |
|---|---|
| City | San Diego, CA, USA |
| Period | 3/2/95 → 3/3/95 |
Fingerprint
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering
Cite this
Design considerations for large MEMS. / Saif, M Taher A; MacDonald, Noel C.
Proceedings of SPIE - The International Society for Optical Engineering. ed. / Vijay K. Varadan. Society of Photo-Optical Instrumentation Engineers, 1995. p. 93-104 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 2448).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Design considerations for large MEMS
AU - Saif, M Taher A
AU - MacDonald, Noel C.
PY - 1995/1/1
Y1 - 1995/1/1
N2 - There has been an increasing need for the design and fabrication of large (few millimeters) MEMS made of micron-size features for a variety of applications. Mechanical design of large MEMS structures needs careful consideration of the forces developed during and after processing to ensure their survivability and reliable performance. forces generated to actuate a device, e.g., capacitive force, are well characterized. However, the forces developed due to conditions of processing, such as fluid forces, have not yet been fully characterized. In this paper, we propose simple models to estimate thermal and intrinsic stresses and the corresponding deformations of large MEMS, as well as fluid forces during wet processing. We also discuss the issue of stability of large MEMS during actuation.
AB - There has been an increasing need for the design and fabrication of large (few millimeters) MEMS made of micron-size features for a variety of applications. Mechanical design of large MEMS structures needs careful consideration of the forces developed during and after processing to ensure their survivability and reliable performance. forces generated to actuate a device, e.g., capacitive force, are well characterized. However, the forces developed due to conditions of processing, such as fluid forces, have not yet been fully characterized. In this paper, we propose simple models to estimate thermal and intrinsic stresses and the corresponding deformations of large MEMS, as well as fluid forces during wet processing. We also discuss the issue of stability of large MEMS during actuation.
UR - http://www.scopus.com/inward/record.url?scp=0029235458&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0029235458&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:0029235458
SN - 0819417971
T3 - Proceedings of SPIE - The International Society for Optical Engineering
SP - 93
EP - 104
BT - Proceedings of SPIE - The International Society for Optical Engineering
A2 - Varadan, Vijay K.
PB - Society of Photo-Optical Instrumentation Engineers
ER -