Design and fabrication of absorber coupled TES microbolometers on continuous silicon-nitride windows

Clarence L. Chang; John E. Carlstrom; Aaron Datesman; Stephan S. Meyer; Valentyn Novosad; Volodymyr G. Yefremenko; Tom Crawford; Tom Downes; Jeff McMahon; Kathryn Miknaitis; Joaquin D. Vieira

doi:10.1007/s10909-007-9639-8

Design and fabrication of absorber coupled TES microbolometers on continuous silicon-nitride windows

Clarence L. Chang, John E. Carlstrom, Aaron Datesman, Stephan S. Meyer, Valentyn Novosad, Volodymyr G. Yefremenko, Tom Crawford, Tom Downes, Jeff McMahon, Kathryn Miknaitis, Joaquin D. Vieira

Research output: Contribution to journal › Article › peer-review

Abstract

The implementation of TES based microbolometer arrays will achieve unprecedented sensitivities for mm and sub-mm astronomy through fabrication of large format arrays and improved linearity and stability arising from strong electro-thermal feedback. We report on progress in developing TES microbolometers using Mo/Au thin films and Au absorbing structures. We present measurements of suppressing the thermal conductance through the etching of features on a continuous Silicon-Nitride window.

Original language	English (US)
Pages (from-to)	245-248
Number of pages	4
Journal	Journal of Low Temperature Physics
Volume	151
Issue number	1-2 PART 1
DOIs	https://doi.org/10.1007/s10909-007-9639-8
State	Published - Apr 2008
Externally published	Yes

Keywords

Bolometers
Polarization
TES

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
Materials Science(all)
Condensed Matter Physics

Online availability

10.1007/s10909-007-9639-8

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Chang, C. L., Carlstrom, J. E., Datesman, A., Meyer, S. S., Novosad, V., Yefremenko, V. G., Crawford, T., Downes, T., McMahon, J., Miknaitis, K., & Vieira, J. D. (2008). Design and fabrication of absorber coupled TES microbolometers on continuous silicon-nitride windows. Journal of Low Temperature Physics, 151(1-2 PART 1), 245-248. https://doi.org/10.1007/s10909-007-9639-8

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title = "Design and fabrication of absorber coupled TES microbolometers on continuous silicon-nitride windows",

abstract = "The implementation of TES based microbolometer arrays will achieve unprecedented sensitivities for mm and sub-mm astronomy through fabrication of large format arrays and improved linearity and stability arising from strong electro-thermal feedback. We report on progress in developing TES microbolometers using Mo/Au thin films and Au absorbing structures. We present measurements of suppressing the thermal conductance through the etching of features on a continuous Silicon-Nitride window.",

keywords = "Bolometers, Polarization, TES",

author = "Chang, {Clarence L.} and Carlstrom, {John E.} and Aaron Datesman and Meyer, {Stephan S.} and Valentyn Novosad and Yefremenko, {Volodymyr G.} and Tom Crawford and Tom Downes and Jeff McMahon and Kathryn Miknaitis and Vieira, {Joaquin D.}",

note = "Funding Information: Acknowledgements This work is supported in part by an LDRD grant at Argonne National Laboratory, NSF grants OPP-0130612 and PHY-0114422, and generous support from the Kavli Foundation and the Gordon and Betty Moore Foundation. We also thank B. Cabrera and S.H. Mosely for helpful discussions.",

year = "2008",

month = apr,

doi = "10.1007/s10909-007-9639-8",

language = "English (US)",

volume = "151",

pages = "245--248",

journal = "Journal of Low Temperature Physics",

issn = "0022-2291",

publisher = "Springer",

number = "1-2 PART 1",

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TY - JOUR

T1 - Design and fabrication of absorber coupled TES microbolometers on continuous silicon-nitride windows

AU - Chang, Clarence L.

AU - Carlstrom, John E.

AU - Datesman, Aaron

AU - Meyer, Stephan S.

AU - Novosad, Valentyn

AU - Yefremenko, Volodymyr G.

AU - Crawford, Tom

AU - Downes, Tom

AU - McMahon, Jeff

AU - Miknaitis, Kathryn

AU - Vieira, Joaquin D.

N1 - Funding Information: Acknowledgements This work is supported in part by an LDRD grant at Argonne National Laboratory, NSF grants OPP-0130612 and PHY-0114422, and generous support from the Kavli Foundation and the Gordon and Betty Moore Foundation. We also thank B. Cabrera and S.H. Mosely for helpful discussions.

PY - 2008/4

Y1 - 2008/4

N2 - The implementation of TES based microbolometer arrays will achieve unprecedented sensitivities for mm and sub-mm astronomy through fabrication of large format arrays and improved linearity and stability arising from strong electro-thermal feedback. We report on progress in developing TES microbolometers using Mo/Au thin films and Au absorbing structures. We present measurements of suppressing the thermal conductance through the etching of features on a continuous Silicon-Nitride window.

AB - The implementation of TES based microbolometer arrays will achieve unprecedented sensitivities for mm and sub-mm astronomy through fabrication of large format arrays and improved linearity and stability arising from strong electro-thermal feedback. We report on progress in developing TES microbolometers using Mo/Au thin films and Au absorbing structures. We present measurements of suppressing the thermal conductance through the etching of features on a continuous Silicon-Nitride window.

KW - Bolometers

KW - Polarization

KW - TES

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UR - http://www.scopus.com/inward/citedby.url?scp=40649104732&partnerID=8YFLogxK

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M3 - Article

AN - SCOPUS:40649104732

SN - 0022-2291

VL - 151

SP - 245

EP - 248

JO - Journal of Low Temperature Physics

JF - Journal of Low Temperature Physics

IS - 1-2 PART 1

ER -

Design and fabrication of absorber coupled TES microbolometers on continuous silicon-nitride windows

Abstract

Keywords

ASJC Scopus subject areas

Online availability

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