Design and fabrication of absorber coupled TES microbolometers on continuous silicon-nitride windows

Clarence L. Chang, John E. Carlstrom, Aaron Datesman, Stephan S. Meyer, Valentyn Novosad, Volodymyr G. Yefremenko, Tom Crawford, Tom Downes, Jeff McMahon, Kathryn Miknaitis, Joaquin D. Vieira

Research output: Contribution to journalArticle

Abstract

The implementation of TES based microbolometer arrays will achieve unprecedented sensitivities for mm and sub-mm astronomy through fabrication of large format arrays and improved linearity and stability arising from strong electro-thermal feedback. We report on progress in developing TES microbolometers using Mo/Au thin films and Au absorbing structures. We present measurements of suppressing the thermal conductance through the etching of features on a continuous Silicon-Nitride window.

Original languageEnglish (US)
Pages (from-to)245-248
Number of pages4
JournalJournal of Low Temperature Physics
Volume151
Issue number1-2 PART 1
DOIs
StatePublished - Apr 1 2008
Externally publishedYes

Keywords

  • Bolometers
  • Polarization
  • TES

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Materials Science(all)
  • Condensed Matter Physics

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    Chang, C. L., Carlstrom, J. E., Datesman, A., Meyer, S. S., Novosad, V., Yefremenko, V. G., Crawford, T., Downes, T., McMahon, J., Miknaitis, K., & Vieira, J. D. (2008). Design and fabrication of absorber coupled TES microbolometers on continuous silicon-nitride windows. Journal of Low Temperature Physics, 151(1-2 PART 1), 245-248. https://doi.org/10.1007/s10909-007-9639-8