Design, analysis, fabrication and testing of a parallel-kinematic micropositioning XY stage

Keyphrases

• Micropositioning 100%
• Design Testing 100%
• Design Analysis 100%
• Parallel Kinematics 100%
• XY Stage 100%
• Frequency Response 33%
• Positioning System 33%
• Step Response 33%
• Feedback Device 33%
• High Bandwidth 33%
• Workspace 33%
• Dynamic Analysis 33%
• Closed-loop 33%
• Optical Fiber Sensor 33%
• Kinematic Analysis 33%
• Piezoelectric Actuator 33%
• Highest Good 33%
• Staging System 33%
• Damping Ratio 33%
• Parallelogram 33%
• Mechanical Structure 33%
• Vibration Mode 33%
• Piezo-driven 33%
• Contouring Performance 33%
• Flexure Hinge 33%
• Position Resolution 33%
• Monolithic Design 33%
• Four-bar Linkage 33%
• Step Frequency 33%
• Good Linearity 33%
• Closed-loop Mode 33%

Engineering

• Closed Loop 100%
• Design Analysis 100%
• Loop Mode 100%
• Open Loop 50%
• Frequency Response 50%
• Fiber Optic Sensor 50%
• Step Response 50%
• Feedback Sensor 50%
• Piezoelectric Actuator 50%
• Damping Ratio ζ 50%
• Mechanical Structure 50%
• Flexure Hinge 50%
• Vibration Mode 50%