Design, analysis, fabrication and testing of a parallel-kinematic micropositioning XY stage

Qing Yao, J. Dong, P. M. Ferreira

Research output: Contribution to journalArticlepeer-review

Abstract

This paper reports on a novel piezo-driven, parallel-kinematic, micropositioning XY stage. This monolithic design is comprised of parallelogram four-bar linkages, flexure hinges, and piezoelectric actuators. Kinematic and dynamic analysis shows that the mechanical structure of the stage has a large work space, high bandwidth and good linearity. The stage system was run in open-loop mode to measure the step response and frequency response. The results show that the resonation frequencies of the two vibration modes are 563 and 536 Hz and the damping ratios are 0.049 and 0.0228. Two fiber optic sensors were added to the system to build a closed-loop positioning system. Linear and circular contouring performance in closed-loop mode suggests high scanning performance for such parallel-kinematic stages. The positioning resolution of the stage, limited only by the feedback sensors used, is about 20 nm.

Original languageEnglish (US)
Pages (from-to)946-961
Number of pages16
JournalInternational Journal of Machine Tools and Manufacture
Volume47
Issue number6
DOIs
StatePublished - May 2007

Keywords

  • Flexure stage
  • Micropositioning
  • Nanopositioning
  • Parallel kinematics
  • Piezoelectric actuator
  • XY stage

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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