@article{db93c418a40949e9801b468c1b5da730,
title = "Deposition of zirconium oxide using atmospheric pressure plasma enhanced chemical vapor deposition with various precursors",
keywords = "Atmospheric pressure plasma, Liquid assisted plasma enhanced chemical vapor deposition, Zirconia, Zirconium acetylacetonate, Zirconium oxynitrate hydrate, Zirconium tert-butoxide",
author = "Dhruval Patel and Lucia Bonova and Zachary Jeckell and Barlaz, \{D. Eitan\} and Santanu Chaudhuri and Krogstad, \{Daniel V.\} and Ruzic, \{David N.\}",
note = "Funding Information: The authors would like to thank Dr. Rick Haasch and Eric Lang for their help with XPS data collection and interpretation. The authors would also like to thank Arash Samaei, Professor Jessica Krogstad, Dr. Joseph Osborne and Dr. Brian Jurczyk for providing various suggestions through the course of this work. This work was supported by the Strategic Environmental Research and Development Program under Project No. WP-2742. SEM, FIB and XPS were carried out in the Materials Research Laboratory Central Research Facilities.",
year = "2021",
month = sep,
day = "1",
doi = "10.1016/j.tsf.2021.138815",
language = "English (US)",
volume = "733",
journal = "Thin Solid Films",
issn = "0040-6090",
publisher = "Elsevier B.V.",
}