Dense CMOS-Photonics Integration in sub-100nm Technology Node

Solomon Assefa, Steven Shank, William M.J. Green, Alexander Rylyakov, Clint Schow, Marwan Khater, Swetha Kamlapurkar, Edward Kiewra, Carol Reinholm, Yurii Vlasov

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Physics

Engineering

Computer Science