Dense CMOS-Photonics Integration in sub-100nm Technology Node

Solomon Assefa; Steven Shank; William M.J. Green; Alexander Rylyakov; Clint Schow; Marwan Khater; Swetha Kamlapurkar; Edward Kiewra; Carol Reinholm; Yurii Vlasov

Dense CMOS-Photonics Integration in sub-100nm Technology Node

Solomon Assefa, Steven Shank, William M.J. Green, Alexander Rylyakov, Clint Schow, Marwan Khater, Swetha Kamlapurkar, Edward Kiewra, Carol Reinholm, Yurii Vlasov

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A sub-100nm technology that allows the monolithic integration of optical devices as features into a 90nm base high-performance logic technology node is demonstrated. The technology is promising for next generation optical communications for applications.

Original language	English (US)
Title of host publication	OptoElectronics and Communications Conference and Photonics in Switching, OECC 2013
Publisher	Optica Publishing Group (formerly OSA)
ISBN (Electronic)	9784885522710
State	Published - 2013
Externally published	Yes
Event	OptoElectronics and Communications Conference and Photonics in Switching, OECC 2013 - Kyoto, Japan Duration: Jun 30 2013 → Jul 4 2013

Publication series

Name	Optics InfoBase Conference Papers
ISSN (Electronic)	2162-2701

Conference

Conference	OptoElectronics and Communications Conference and Photonics in Switching, OECC 2013
Country/Territory	Japan
City	Kyoto
Period	6/30/13 → 7/4/13

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanics of Materials

Library availability

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Cite this

Assefa, S., Shank, S., Green, W. M. J., Rylyakov, A., Schow, C., Khater, M., Kamlapurkar, S., Kiewra, E., Reinholm, C., & Vlasov, Y. (2013). Dense CMOS-Photonics Integration in sub-100nm Technology Node. In OptoElectronics and Communications Conference and Photonics in Switching, OECC 2013 Article TuN2-1 (Optics InfoBase Conference Papers). Optica Publishing Group (formerly OSA).

Dense CMOS-Photonics Integration in sub-100nm Technology Node. / Assefa, Solomon; Shank, Steven; Green, William M.J. et al.
OptoElectronics and Communications Conference and Photonics in Switching, OECC 2013. Optica Publishing Group (formerly OSA), 2013. TuN2-1 (Optics InfoBase Conference Papers).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Assefa, S, Shank, S, Green, WMJ, Rylyakov, A, Schow, C, Khater, M, Kamlapurkar, S, Kiewra, E, Reinholm, C & Vlasov, Y 2013, Dense CMOS-Photonics Integration in sub-100nm Technology Node. in OptoElectronics and Communications Conference and Photonics in Switching, OECC 2013., TuN2-1, Optics InfoBase Conference Papers, Optica Publishing Group (formerly OSA), OptoElectronics and Communications Conference and Photonics in Switching, OECC 2013, Kyoto, Japan, 6/30/13.

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abstract = "A sub-100nm technology that allows the monolithic integration of optical devices as features into a 90nm base high-performance logic technology node is demonstrated. The technology is promising for next generation optical communications for applications.",

author = "Solomon Assefa and Steven Shank and Green, {William M.J.} and Alexander Rylyakov and Clint Schow and Marwan Khater and Swetha Kamlapurkar and Edward Kiewra and Carol Reinholm and Yurii Vlasov",

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AU - Shank, Steven

AU - Green, William M.J.

AU - Rylyakov, Alexander

AU - Schow, Clint

AU - Khater, Marwan

AU - Kamlapurkar, Swetha

AU - Kiewra, Edward

AU - Reinholm, Carol

AU - Vlasov, Yurii

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M3 - Conference contribution

AN - SCOPUS:85136828729

T3 - Optics InfoBase Conference Papers

BT - OptoElectronics and Communications Conference and Photonics in Switching, OECC 2013

PB - Optica Publishing Group (formerly OSA)

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Y2 - 30 June 2013 through 4 July 2013

ER -

Dense CMOS-Photonics Integration in sub-100nm Technology Node

Abstract

Publication series

Conference

ASJC Scopus subject areas

Library availability

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