Dense CMOS-photonics integration in sub-100nm technology node

Solomon Assefa, Steven Shank, William M.J. Green, Alexander Rylyakov, Clint Schow, Marwan Khater, Swetha Kamlapurkar, Edward Kiewra, Carol Reinholm, Yurii Vlasov

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A sub-100nm technology that allows the monolithic integration of optical devices as features into a 90nm base high-performance logic technology node is demonstrated. The technology is promising for next generation optical communications for applications.

Original languageEnglish (US)
Title of host publication2013 18th OptoElectronics and Communications Conference Held Jointly with 2013 International Conference on Photonics in Switching, OECC/PS 2013
StatePublished - Oct 28 2013
Externally publishedYes
Event2013 18th OptoElectronics and Communications Conference Held Jointly with 2013 International Conference on Photonics in Switching, OECC/PS 2013 - Kyoto, Japan
Duration: Jun 30 2013Jul 4 2013

Publication series

Name2013 18th OptoElectronics and Communications Conference Held Jointly with 2013 International Conference on Photonics in Switching, OECC/PS 2013

Other

Other2013 18th OptoElectronics and Communications Conference Held Jointly with 2013 International Conference on Photonics in Switching, OECC/PS 2013
CountryJapan
CityKyoto
Period6/30/137/4/13

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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  • Cite this

    Assefa, S., Shank, S., Green, W. M. J., Rylyakov, A., Schow, C., Khater, M., Kamlapurkar, S., Kiewra, E., Reinholm, C., & Vlasov, Y. (2013). Dense CMOS-photonics integration in sub-100nm technology node. In 2013 18th OptoElectronics and Communications Conference Held Jointly with 2013 International Conference on Photonics in Switching, OECC/PS 2013 [6597358] (2013 18th OptoElectronics and Communications Conference Held Jointly with 2013 International Conference on Photonics in Switching, OECC/PS 2013).