Demonstration of superconducting micromachined cavities

T. Brecht, M. Reagor, Y. Chu, W. Pfaff, C. Wang, L. Frunzio, M. H. Devoret, R. J. Schoelkopf

Research output: Contribution to journalArticlepeer-review


Superconducting enclosures will be key components of scalable quantum computing devices based on circuit quantum electrodynamics. Within a densely integrated device, they can protect qubits from noise and serve as quantum memory units. Whether constructed by machining bulk pieces of metal or microfabricating wafers, 3D enclosures are typically assembled from two or more parts. The resulting seams potentially dissipate crossing currents and limit performance. In this letter, we present measured quality factors of superconducting cavity resonators of several materials, dimensions, and seam locations. We observe that superconducting indium can be a low-loss RF conductor and form low-loss seams. Leveraging this, we create a superconducting micromachined resonator with indium that has a quality factor of two million, despite a greatly reduced mode volume. Inter-layer coupling to this type of resonator is achieved by an aperture located under a planar transmission line. The described techniques demonstrate a proof-of-principle for multilayer microwave integrated quantum circuits for scalable quantum computing.

Original languageEnglish (US)
Article number192603
JournalApplied Physics Letters
Issue number19
StatePublished - Nov 9 2015
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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