Degradation of Insulators in Silicon Selective Epitaxial Growth (SEG) Ambient

R. Bashir, S. Kim, N. Oadri, D. Jin, G. W. Neudeck, J. P. Denton, G. Yeric, K. Wu, A. Tasch

Research output: Contribution to journal › Article › peer-review

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Material Science

Engineering

Chemical Engineering