We report a technique to calibrate the sensitivity of sensor-integrated atomic force microscope cantilevers using pseudo-gratings. An offset signal superposed onto the cantilever control signal modulates the cantilever position over a flat surface, driving the cantilever toward and away from the surface in a controlled way. The relationship between the cantilever sensor signal and displacement provides the cantilever calibration. We show how this technique can be used to calibrate heated microcantilever sensors.

Original languageEnglish (US)
Article number6204307
Pages (from-to)2666-2667
Number of pages2
JournalIEEE Sensors Journal
Issue number8
StatePublished - 2012


  • Atomic force microscopy
  • calibration
  • deflection sensitivity
  • heated microcantilever

ASJC Scopus subject areas

  • Instrumentation
  • Electrical and Electronic Engineering


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