Defect structure in micropillars using x-ray microdiffraction

Keyphrases

• Focused Ion Beam 100%
• Defected Ground Structure 100%
• Micropillar 100%
• Microdiffraction 100%
• Microstructure 50%
• Laue 50%
• Micron-sized 50%
• Focused Ion Beam Machining 50%
• Strain Gradient 50%
• Si Structures 50%
• Reactive Ion Etching 50%
• Continuous and Discontinuous 50%
• White Beam 50%
• Laue Patterns 50%
• Si pillars 50%
• Metallic pillar 50%
• Ion Beam Damage 50%

Material Science

• Focused Ion Beam 100%
• Defect Structure 100%
• Machining 33%
• Reactive Ion Etching 33%