@article{8ebd8a7083d944428f864ad6e68678b9,
title = "Defect structure in micropillars using x-ray microdiffraction",
abstract = "White beam x-ray microdiffraction is used to investigate the microstructure of micron-sized Si, Au, and Al pillars fabricated by focused ion beam (FIB) machining. Comparison with a Laue pattern obtained from a Si pillar made by reactive ion etching reveals that the FIB damages the Si structure. The Laue reflections obtained from the metallic pillars fabricated by FIB show continuous and discontinuous streakings, demonstrating the presence of strain gradients.",
author = "R. Maa{\ss} and D. Grolimund and {Van Petegem}, S. and M. Willimann and M. Jensen and {Van Swygenhoven}, H. and T. Lehnert and Gijs, {M. A.M.} and Volkert, {C. A.} and Lilleodden, {E. T.} and R. Schwaiger",
note = "Funding Information: The authors thank the EPFL Center of MicroNano Technology (EPFL-CMI) for help in the process development, in particular, Micha{\"e}l Pavius for preparing the FIB samples; furthermore the authors thank Stefan Brandstetter for help during beam time and Peter M. Derlet for useful discussions. One of the authors (H.V.S.) thanks the Swiss National Science Foundation and the European Commission (sixth Framework) for financial support of the project NANOMESO.",
year = "2006",
doi = "10.1063/1.2358204",
language = "English (US)",
volume = "89",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics",
number = "15",
}