Defect structure in micropillars using x-ray microdiffraction

R. Maaß, D. Grolimund, S. Van Petegem, M. Willimann, M. Jensen, H. Van Swygenhoven, T. Lehnert, M. A.M. Gijs, C. A. Volkert, E. T. Lilleodden, R. Schwaiger

Research output: Contribution to journalArticlepeer-review


White beam x-ray microdiffraction is used to investigate the microstructure of micron-sized Si, Au, and Al pillars fabricated by focused ion beam (FIB) machining. Comparison with a Laue pattern obtained from a Si pillar made by reactive ion etching reveals that the FIB damages the Si structure. The Laue reflections obtained from the metallic pillars fabricated by FIB show continuous and discontinuous streakings, demonstrating the presence of strain gradients.

Original languageEnglish (US)
Article number151905
JournalApplied Physics Letters
Issue number15
StatePublished - 2006
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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