Abstract
The microstructure of nominally undoped epitaxial wurtzite-structure α-GaN films, grown by gas-source molecular-beam epitaxy, plasma-assisted molecular-beam epitaxy, and metalorganic chemical-vapor deposition, has been investigated by transmission electron microscopy (TEM) and high-resolution TEM. The results show that undoped α-GaN films have an ordered point-defect structure. A model of this defect-ordered microstructure, based upon a comparison between experimental results and computer simulations, is proposed.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 8195-8197 |
| Number of pages | 3 |
| Journal | Journal of Applied Physics |
| Volume | 76 |
| Issue number | 12 |
| DOIs | |
| State | Published - 1994 |
| Externally published | Yes |
ASJC Scopus subject areas
- General Physics and Astronomy
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