Deciphering intermodulation in AlN laterally vibrating resonators

Ruochen Lu, Anming Gao, Songbin Gong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports an analytical and quantitative method that, for the first time, precisely predicts the third-order intermodulation distortion (IMD3) in AlN laterally vibrating resonators (LVRs). The simulated IMD3 reaches an excellent agreement with the measurements for a fabricated 453.4 MHz AlN LVR. This method provides an unprecedented framework for enhancing the power handling and reducing the nonlinearity of AlN LVRs to meet the requirements of RF front-end filtering.

Original languageEnglish (US)
Title of host publicationMEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages671-674
Number of pages4
ISBN (Electronic)9781509019731
DOIs
StatePublished - Feb 26 2016
Event29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China
Duration: Jan 24 2016Jan 28 2016

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2016-February
ISSN (Print)1084-6999

Other

Other29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
CountryChina
CityShanghai
Period1/24/161/28/16

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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