TY - GEN
T1 - Deciphering intermodulation in AlN laterally vibrating resonators
AU - Lu, Ruochen
AU - Gao, Anming
AU - Gong, Songbin
N1 - Publisher Copyright:
© 2016 IEEE.
PY - 2016/2/26
Y1 - 2016/2/26
N2 - This paper reports an analytical and quantitative method that, for the first time, precisely predicts the third-order intermodulation distortion (IMD3) in AlN laterally vibrating resonators (LVRs). The simulated IMD3 reaches an excellent agreement with the measurements for a fabricated 453.4 MHz AlN LVR. This method provides an unprecedented framework for enhancing the power handling and reducing the nonlinearity of AlN LVRs to meet the requirements of RF front-end filtering.
AB - This paper reports an analytical and quantitative method that, for the first time, precisely predicts the third-order intermodulation distortion (IMD3) in AlN laterally vibrating resonators (LVRs). The simulated IMD3 reaches an excellent agreement with the measurements for a fabricated 453.4 MHz AlN LVR. This method provides an unprecedented framework for enhancing the power handling and reducing the nonlinearity of AlN LVRs to meet the requirements of RF front-end filtering.
UR - http://www.scopus.com/inward/record.url?scp=84970998081&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84970998081&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2016.7421715
DO - 10.1109/MEMSYS.2016.7421715
M3 - Conference contribution
AN - SCOPUS:84970998081
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 671
EP - 674
BT - MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
Y2 - 24 January 2016 through 28 January 2016
ER -