Decal transfer lithography

William Childs (Inventor), Keon Jae Lee (Inventor), Ralph G Nuzzo (Inventor), Michael J Motala (Inventor)

Research output: Patent


A method of making a microstructure includes selectively activating a portion of a surface of a silicon-containing elastomer, contacting the activated portion with a substance, and bonding the activated portion and the substance, such that the activated portion of the surface and the substance in contact with the activated portion are irreversibly attached. The selective activation may be accomplished by positioning a mask on the surface of the silicon-containing elastomer, and irradiating the exposed portion with UV radiation.
Original languageEnglish (US)
U.S. patent number7662545
StatePublished - Feb 16 2010


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