TY - GEN
T1 - DC and AC electrothermal charicterization of heated microcantilevers using scanning thermoreflectance microscopy
AU - Kim, Joohyun
AU - Han, Sunwoo
AU - Park, Keunhan
AU - Lee, Bong Jae
AU - King, William Paul
AU - Lee, Jungchul
PY - 2013
Y1 - 2013
N2 - We report the application of scanning thermoreflectance microscopy for steady - as well as periodic-temperature calibration of a microheater-integrated atomic force microscope cantilever (or heated microcantilever). While the heated microcantilever was operated with either DC or AC powers, local thermoreflectance signals were measured using a home-built scanning thermoreflectance microscope and converted into local temperatures using a calibration with Raman thermometry. For our scanning thermoreflectance microscopy, temporal resolution of 10 μs and spatial resolution of 2 μm were achieved. The shrinkage of the AC temperature oscillation amplitude was observed as the modulation frequency increased and thermal cut-off frequency near 1 kHz was found. In addition, strong thickness-dependent thermoreflectance signals were experimentally confirmed and might be useful for noncontact thickness measurements of free standing microelectromechanical systems devices having uniform temperatures.
AB - We report the application of scanning thermoreflectance microscopy for steady - as well as periodic-temperature calibration of a microheater-integrated atomic force microscope cantilever (or heated microcantilever). While the heated microcantilever was operated with either DC or AC powers, local thermoreflectance signals were measured using a home-built scanning thermoreflectance microscope and converted into local temperatures using a calibration with Raman thermometry. For our scanning thermoreflectance microscopy, temporal resolution of 10 μs and spatial resolution of 2 μm were achieved. The shrinkage of the AC temperature oscillation amplitude was observed as the modulation frequency increased and thermal cut-off frequency near 1 kHz was found. In addition, strong thickness-dependent thermoreflectance signals were experimentally confirmed and might be useful for noncontact thickness measurements of free standing microelectromechanical systems devices having uniform temperatures.
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U2 - 10.1109/MEMSYS.2013.6474265
DO - 10.1109/MEMSYS.2013.6474265
M3 - Conference contribution
AN - SCOPUS:84875441869
SN - 9781467356558
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 409
EP - 412
BT - IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
T2 - IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Y2 - 20 January 2013 through 24 January 2013
ER -