TY - JOUR
T1 - Crystalline texture in hafnium diboride thin films grown by chemical vapor deposition
AU - Yang, Yu
AU - Jayaraman, Sreenivas
AU - Kim, Do Young
AU - Girolami, Gregory S.
AU - Abelson, John R.
N1 - Funding Information:
The authors are grateful to the National Science Foundation for support of this research under Grant nos. CH00-76061, DMR03-54060, and DMR04-20768. Compositional and structural analyses of the films were carried out in the Center for Microanalysis of Materials, University of Illinois, which is supported by the US Department of Energy under Grant no. DOE DEFG02-91ER45439.
PY - 2006/9/4
Y1 - 2006/9/4
N2 - The texture evolution of hafnium diboride (HfB2) thin films grown by chemical vapor deposition from the single source precursor Hf(BH4)4 was studied. Films grown on amorphous substrates show a (0 0 0 1) orientation at growth temperatures ≤700 °C, but a (1 0under(1, {combining low line}) 0) orientation at 800 °C and above. Single-crystal substrates greatly influence the preferred orientation and in-plane texture of the films: (1 0under(1, {combining low line}) 0) orientation is favored on Si (0 0 1), whereas there is a strong tendency to grow in a (0 0 0 1) orientation on Si (1 1 1). At a growth temperature of 950 °C, HfB2 can be epitaxially grown on Si (1 1 1) substrates.
AB - The texture evolution of hafnium diboride (HfB2) thin films grown by chemical vapor deposition from the single source precursor Hf(BH4)4 was studied. Films grown on amorphous substrates show a (0 0 0 1) orientation at growth temperatures ≤700 °C, but a (1 0under(1, {combining low line}) 0) orientation at 800 °C and above. Single-crystal substrates greatly influence the preferred orientation and in-plane texture of the films: (1 0under(1, {combining low line}) 0) orientation is favored on Si (0 0 1), whereas there is a strong tendency to grow in a (0 0 0 1) orientation on Si (1 1 1). At a growth temperature of 950 °C, HfB2 can be epitaxially grown on Si (1 1 1) substrates.
KW - A3. Chemical vapor deposition processes
KW - A3. Crystalline texture
KW - B1. Metal diborides
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U2 - 10.1016/j.jcrysgro.2006.05.035
DO - 10.1016/j.jcrysgro.2006.05.035
M3 - Article
AN - SCOPUS:33846201946
VL - 294
SP - 389
EP - 395
JO - Journal of Crystal Growth
JF - Journal of Crystal Growth
SN - 0022-0248
IS - 2
ER -